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Majid Zarezadeh Mehrizi

Majid Zarezadeh Mehrizi

Academic rank: Associate Professor
ORCID: https://orcid.org/0000-0002-6187-8592
Education: PhD.
ScopusId: 42862660300
HIndex:
Faculty: Engineering
Address: Arak University
Phone:

Research

Title
Determination of Residual Stress of PACVD Nanostructure TiN Coatings by GIXRD Method
Type
JournalPaper
Keywords
TiN; plasma assisted chemical vapor deposition; residual stress; GIXRD
Year
2018
Journal journal of advanced materials and processing
DOI
Researchers Mehdi Raoufi ، Seyed Abdolali Zolanvari ، Majid Zarezadeh Mehrizi

Abstract

In this study, thin layers of titanium nitride (TiN) were deposited on H13 steel substrates at different duty cycles and temperature of 520 ˚C using plasma assisted chemical vapor deposition (PACVD). Uniaxial residual stress was calculated by X-ray diffraction (XRD) and Sin2 Ψ method. Then the residual stress of the samples were measured by Grazing Incidence X-ray Diffraction (GIXRD) method and lattice parameter diagrams versus f(Ψ). Depth of penetration and texture coefficient in the samples were also evaluated. The surface morphology was examined using field-emission gun scanning electron microscope (FESEM) and the relationship of the stress and micro hardness test was also expressed. The results showed that by reducing duty cycles, residual stress decreases as well as with more changes of the lattice parameter, more changes of residual stress will be seen. Also, the microstructure result was in good agreement with theory and clearly displayed spherical morphology and uniform distribution of the created phases