Ag (Au)/SiO2 nanostructured thin films were fabricated on n-type silicon substrates by Radio Frequency (RF) magnetron sputtering technique. Crystalline, surface topography and optical properties of the prepared films were analyzed using X-ray diffractometry (XRD) technique, Atomic Force Microscopy (AFM) and UV–visible spectrophotometry, respectively. Optical absorption spectrum of the Ag/SiO2 thin films showed one surface plasmon resonance (SPR) absorption peak located at 310 nm relating to silver nanoparticles while the SPR peak in Au/SiO2 sample experienced a redshift around 450 nm.