Elastic constants of zinc oxide thin films have been determined using sin2ψ method. Surface morphology and crystalline structure of zinc oxide were examined, using atomic force microscope (AFM) and field emission scanning electron microscope (FESEM). The different planes and lattice parameters of ZnO films were obtained by High Temperature X-Ray Diffraction (HT-XRD) method. The minimum stress and residual stress were found to be 1.27±4.88 Mpa and4.62±0.23 Mpa for (101) and (110) different atomic planes
