Simulation of manipulation is a basic tool for accurate and controllable displacement of bodies and particles at micro and nano scale. The Atomic Force Microscope (AFM) system has become a useful tool for direct measurement of micro and nano structural parameters and for unraveling the intermolecular forces at nanoscale level with atomicresolution characterization. Friction forces are a part of the surface properties that play an important role in the manipulation of nanoparticles. In order to gain more precise manipulation, di erent friction models have been developed, one of which is the LuGre model. In this paper, the sensitivity of the manipulation of nanoparticles has been analyzed using dimensional and environmental parameters, based on the LuGre friction model, using the Sobol method. In previous work, sensitivity analysis has been performed using graphical sensitivity analysis. Hence, the importance percentages of the parameters are not clear, but, the Sobol method, which is a statistical model, solves this problem. Results show that cantilever thickness is the most e ective dimensional parameter on the critical force value, while cantilever length and width are less important. Environmental parameters, such as cantilever elasticity modulus, substrate velocity and adhesion, respectively, take the next orders.
